Recipient Lih J. Chen

Lecture Title:
Nanoscale Metal Silicides

Biography:
Professor Lih. J. Chen is Deputy Minister of National Science Council and Ministry of Education National Chair Professor at the Department of Materials Science and Engineering (MSE), National Tsing Hua University. He received B.S. degree in Physics from National Taiwan University in 1968 and Ph.D. degree in Physics from University of California, Berkeley in 1974. He became a professor at the National Tsing Hua University in 1979 and continued on to become the MSE Department Chairman and Dean of the College of Engineering. From 2006 to 2008, he served as the Vice Chancellor for Research and Development, University System of Taiwan. His professional service included the President of Materials Research Society of Taiwan and Microscopy Society of Taiwan, Second Vice President, International Union of Materials Research Societies and Editor of Materials Chemistry and Physics.

Professor Chen has conducted extensive research on integrated circuits thin film materials over almost three decades. His research interests include epitaxial growth of silicides on silicon, interface structure of silicides on silicon, solid-state amorphization in metal-Si systems, advanced metallization in integrated circuits, solid phase epitaxial growth and removal of defects in ion implanted silicon as well as interfacial reactions of metal thin films on Ge and Si-Ge alloys. In recent years, he has focused on the low-dimension nanostructured materials, particularly nanoscale metal silicdes. He has published more than 410 papers in SCI journal and obtained 20 patents. In addition, he has written two books, two monographs, edited one book and 6 conference proceedings.

Professor Chen has won almost every major award and prize from National Science Council and Ministry of Education in Taiwan. In 1998, he was elected to be the Outstanding Scholarship Foundation Chair (1998-2003) and Ministry of Education National Chair Professor (1998-2001) and member of Asian Pacific Academy of Advanced Materials. In 2001, he was awarded the Ministry of Education National Chair Professor on a permanent basis and elected to be a fellow by the American Vacuum Society. In recognition of his outstanding research, Tsing Hua University awarded him the Tsing Hua Chair Professor of Engineering in 2003 and Distinguished Chair Professor in 2006. He was elected to be a member of Academia Sinica (Academy of Sciences, Humanities and Social Sciences in Taiwan) in 2006.