TMS Logo

1997 TMS Annual Meeting: Tuesday Abstracts



LOW ENERGY PROCESSES IN ELECTRONIC MATERIALS: Session I: Energetic Beam Deposition and Synthesis

Sponsored by: EMPMD Thin Films and Interfaces Committee
Program Organizers: Rajiv K. Singh, University of Florida, 317 MAE, PO Box 116400, Gainesville, FL 32611-6400; O.W. Holland, Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831; Steve Pearton, University of Florida, 343 NSC, PO Box 116400, Gainesville, FL 32611-6400; Roy Clarke, Department of Applied Physics, University of Michigan, Ann Arbor, MI 48109-1120; D. Kumar, University of Florida, PO Box 116400, Gainesville, FL 32611

Proceedings Info
Next Session
Return To Program Contents Page

Room: 314B

Session Chairperson: Rajiv K. Singh, University of Florida, 317 MAE, PO Box 116400, Gainesville, FL 32611-6400


8:30 am INVITED

ATOMIC VERSUS MOLECULAR BEAMS FOR DOPING OF III-V MATERIALS DURING GROWTH IN ULTRAHIGH VACUUM: C.R. Abernathy, University of Florida, PO Box 116400, Gainesville, FL 32611

9:00 am INVITED

RECENT ADVANCES IN CARBON NITRIDE AND RELATED HARD COATING MATERIALS: Y.P. Chung, North Western University, 2145 Sheridan Rd., Evanston, IL 60208

9:30 am INVITED

MEASUREMENTS AND SIMULATION OF BEAM-ENHANCED EPITAXIAL GROWTH PROCESSES: E.H. Chason, Sandia National Laboratory, Albuquerque, NM 87185

10:00 am BREAK

Session Chairperson: Roy Clarke, Department of Applied Physics, University of Michigan, Ann Arbor, MI 48109-1120

10:15 am INVITED

MICROSTRUCTURAL EVOLUTION IN LOW ENERGY BEAM PROCESSING OF THIN FILMS: Krishna Rajan, Rensselaer Polytechnique Institute, Dept. of Materials Science & Eng., MRC-110, Troy, NY 12180-3590

10:45 am INVITED

UHV SPUTTER-DEPOSITION OF ULTRATHIN MAGNETIC FILMS AND MULTILAYERS: J.R. Childress, University of Florida, PO Box 116400, Gainesville, FL 32611

11:15 am

DEPOSITION OF DIAMOND FROM ALCOHOL PRECURSORS IN AN ELECTRON CYCLOTRON RESONANCE PLASMA: Donald R. Gilbert, Rajiv K. Singh, University of Florida, PO Box 116400, Gainesville, FL 32611

11:30 am INVITED

SPUTTER DEPOSITION OF PHOSPHORS FOR ELECTROLUMINESCENT FLAT PANEL DISPLAY: Mark R. Davidson, Paul H. Holloway, Balu Pathangey, University of Florida, University of Florida, PO Box 116400, Gainesville, FL 32611


Next Session
Search Technical Program Contents 1997 Annual Meeting Page TMS Meetings Page TMS OnLine